Title :
Laser chemical processing for three-dimensional microstructures
Author_Institution :
Max-Planck-Inst. fur Biophys. Chem., Gottingen, Germany
Abstract :
Summary form only given. Removal of material or deposition-both with spatial control-can be induced by interaction of laser light with surfaces that are in contact with a suitable chemical environment. This talk will focus on three topics: (a) laser ablation of metals with short UV pulses, (b) laser direct write three-dimensional (3D) deposition of 3D microstructures, and (c) laser fabrication of a microchannel system in PMMA by UV excimer laser ablation.
Keywords :
excimer lasers; high-speed optical techniques; laser ablation; laser materials processing; pulsed laser deposition; 3D microstructures; PMMA; UV excimer laser ablation; chemical environment; laser ablation; laser chemical processing; laser direct write 3D deposition; laser fabrication; laser light interactions; metals; microchannel system; short UV pulses; spatial control; three-dimensional microstructures; Chemical lasers; Chemical processes; Laser ablation; Lighting control; Microstructure; Optical control; Optical materials; Optical pulses; Pulsed laser deposition; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
1-55752-339-0
DOI :
10.1109/CLEO.1998.676559
