Title :
Pondermotive-driven "acceleration" of etch rates for short-pulse laser micromachining of transparent glasses
Author :
Herman, Peter R. ; Higaki, Hiroaki ; Rouillon, E. ; Marjoribanks, R.S.
Author_Institution :
Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
Abstract :
Summary form only given. The move to picosecond and subpicosecond laser materials processing marks an important transition between conventional micromachining applications using nanosecond lasers and new strong-field interactions driven only by intense femtosecond laser light. Shorter-duration pulses provide more precise etch control and negligible thermal stress for application to a diverse range of materials, including transparent ones such as glass. In this paper, laser ablation of transparent glasses at high field intensity is described in the transitional picosecond domain.
Keywords :
chirp modulation; glass; high-speed optical techniques; laser ablation; laser beam etching; laser beam machining; micromachining; optical pulse compression; chirped pulse amplification; etch rates; high field intensity; improved surface morphology; laser ablation; picosecond laser materials processing; pondermotive-driven acceleration; rapid etching; short-pulse laser micromachining; strong-field interactions; subpicosecond laser materials processing; transitional picosecond domain; transparent glasses; Etching; Glass; Laser ablation; Laser applications; Laser transitions; Materials processing; Micromachining; Optical materials; Stress control; Thermal stresses;
Conference_Titel :
Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
1-55752-339-0
DOI :
10.1109/CLEO.1998.676583