Optical couplers in silicon-on-insulator technology

Author

Trinh, P.D. ; Yegnanarayanan, S. ; Jalali, Bahram

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

fYear

1996

fDate

2-7 June 1996

Firstpage

250

Lastpage

251

Abstract

Summary form only given. Silicon-on-insulator technology promises improved performance for CMOS integrated circuits. Due to their unique optical properties, SOI structures offer the ability to integrate long-wavelength photonic devices into the CMOS integrated circuits. A 5/spl times/9 star coupler was fabricated with rib waveguide widths of 4 /spl mu/m and rib height of 2.0 /spl mu/m. Each waveguide is composed of a straight and a curved section followed by a radial section directed toward the center of the opposite array.

Keywords

CMOS integrated circuits; arrays; integrated optics; integrated optoelectronics; optical couplers; optical waveguides; rib waveguides; silicon-on-insulator; 2 mum; 4 mum; 5 x 9 star coupler; CMOS integrated circuits; SOI structures; curved section; long-wavelength photonic device integration; opposite array; optical couplers; optical properties; radial section; rib height; rib waveguide widths; silicon-on-insulator technology; straight section; Directional couplers; Etching; Loss measurement; Optical coupling; Optical devices; Optical refraction; Optical variables control; Optical waveguides; Propagation losses; Silicon on insulator technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on

Conference_Location

Anaheim, CA, USA

Print_ISBN

1-55752-443-2

Type

conf

Filename

864629