Identification of some key parameters for photoelectric laser stimulation of IC: an experimental approach

Author

Perdu, Philippe ; Desplats, Romain ; Sanchez, Kevin ; Beaudoin, Felix ; Lewis, Dean ; Pouget, Vincent ; Douin, Alexandre ; Fouíllat, Pascal

Author_Institution

CNES, Toulouse, France

fYear

2005

fDate

27 June-1 July 2005

Firstpage

21

Lastpage

26

Abstract

The aim of this paper is to give a phenomenological approach of PLS in order to establish and justify what is the right choice of key parameters to perform a specific analysis. In this paper, we mostly focus on medium and low laser power density range. Our approach is built from experimental studies done on different apparatus giving us a wide range of parameter choices: from power densities in GW/cm² to mW/cm² range, from continuous to ultra short pulse, from fixed position to variable slow scan. This unique opportunity, experimental results and simulation performed has contributed to extend PLS knowledge.

Keywords

OBIC; integrated circuit testing; laser beam applications; p-n junctions; continuous pulse; fixed position scan; integrated circuit; laser power density; phenomenological approach; photoelectric laser stimulation; ultra short pulse; variable slow scan; Integrated circuit modeling; Laser ablation; Laser modes; Laser theory; Optical materials; Photoconductivity; Power lasers; Pulsed laser deposition; Testing; Thermal stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

Physical and Failure Analysis of Integrated Circuits, 2005. IPFA 2005. Proceedings of the 12th International Symposium on the

Print_ISBN

0-7803-9301-5

Type

conf

DOI

10.1109/IPFA.2005.1469124

Filename

1469124