A high-voltage CMOS VLSI programmable fluidic processor chip

Author

Current, K. ; Yuk, K. ; McConaghy, C. ; Gascoyne, P. ; Schwartz, J. ; Vykoukal, J. ; Andrews, C.

Author_Institution

California Univ., Davis, CA, USA

fYear

2005

fDate

16-18 June 2005

Firstpage

72

Lastpage

75

Abstract

A high-voltage (HV) SOI CMOS VLSI chip has been demonstrated to transport droplets on programmable paths across its coated surface. This HV exciter for a fluidic lab-on-a-chip system creates dielectrophoretic forces that move and help inject droplets. Electrode excitation voltage and frequency are variable: at 100V, f_ELECmax = 200Hz. Data communication rate is variable up to 250kHz. This 10,377μm-by-8210μm demonstration chip has a 32×32 array of nominally 100V electrode drivers dissipating 1.87W max.

Keywords

CMOS integrated circuits; VLSI; drops; microfluidics; microprocessor chips; power integrated circuits; programmable circuits; system-on-chip; 1.87 W; 100 V; 200 Hz; MEMS; SOI; data communication; dielectrophoretic force; electrode excitation; high voltage CMOS VLSI; lab on a chip; programmable fluidic processor chip; transport droplets; Biomedical electrodes; CMOS process; Chemical analysis; Data communication; Dielectrophoresis; Electric fields; Frequency; Polarization; Very large scale integration; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Circuits, 2005. Digest of Technical Papers. 2005 Symposium on

Print_ISBN

4-900784-01-X

Type

conf

DOI

10.1109/VLSIC.2005.1469337

Filename

1469337