2D coupled electrostatic-mechanical model for shunt-capacitive MEMS switch based on Matlab program

A two-dimensional (2D) coupled electro-mechanical model for shunt-capacitive RF MEMS switch based on finite difference method (FDM) has been developed. The corresponding electrostatic potential, the forces, the capacitance, and the beam deformation have been calculated. The computed pull down voltage for different structures agrees well with the published data. The proposed program combines the electrostatic and the mechanical analysis and gives accurate results in short running time compared to the published techniques, which are based on 3D commercial packages.