Fast full-wave analysis of distributed MEMS transmission lines by the MoL

Growing interest in MEMS devices employing a high number of movable elements increases the need for a fast but rigorous simulation tool. Full discretization methods are too time-consuming for these finite periodic circuits, but the method of lines (MoL) enables an efficient full-wave analysis. The CPU time is completely independent of the number of periods because of the analytical solution in longitudinal direction and the use of Floquet modes as eigensolutions. Distributed MEMS transmission lines (DTMLs) with up to 45 bridges are investigated.