Fast full-wave analysis of distributed MEMS transmission lines by the MoL

Author

Pascher, Wilfrid ; Pregla, Reinhold ; Vietzorreck, Larissa

Author_Institution

Electromagn. Field Theory, Hagen Univ., Germany

fYear

2005

fDate

3-7 April 2005

Firstpage

763

Lastpage

766

Abstract

Growing interest in MEMS devices employing a high number of movable elements increases the need for a fast but rigorous simulation tool. Full discretization methods are too time-consuming for these finite periodic circuits, but the method of lines (MoL) enables an efficient full-wave analysis. The CPU time is completely independent of the number of periods because of the analytical solution in longitudinal direction and the use of Floquet modes as eigensolutions. Distributed MEMS transmission lines (DTMLs) with up to 45 bridges are investigated.

Keywords

eigenvalues and eigenfunctions; method of lines; micromechanical devices; transmission lines; Floquet modes; MEMS devices; distributed MEMS transmission lines; eigensolutions; finite periodic circuits; full-wave analysis; method of lines; Bridge circuits; Circuit simulation; Distributed parameter circuits; Electromagnetic field theory; Microelectromechanical devices; Micromechanical devices; Periodic structures; Transmission line theory; Transmission lines; Varactors;

fLanguage

English

Publisher

ieee

Conference_Titel

Wireless Communications and Applied Computational Electromagnetics, 2005. IEEE/ACES International Conference on

Print_ISBN

0-7803-9068-7

Type

conf

DOI

10.1109/WCACEM.2005.1469697

Filename

1469697