Title :
Surface-micromachined Fabry-Perot tunable filter for wavelength-division multiplexing systems
Author :
Tran, A.T.T.D. ; Lo, Y.H. ; Zhu, Z.H.
Author_Institution :
Sch. of Appl. & Eng. Phys., Cornell Univ., Ithaca, NY, USA
Abstract :
Summary form only given. In conclusion we have developed a low-temperature surface micromachining process that can be applied to various substrates such as Si, glass, and GaAs. We have demonstrated a tunable optical filter with a 60 nm tuning range near 1.5 /spl mu/m, and a transmission linewidth of 5 nm. This device might find applications in WDM systems and optical sensing.
Keywords :
integrated optics; micromachining; multiplexing equipment; optical communication equipment; optical fabrication; optical filters; optical sensors; tuning; wavelength division multiplexing; GaAs; Si; WDM systems; glass; low-temperature surface micromachining process; nm tuning range; optical sensing; substrates; surface-micromachined Fabry-Perot tunable filter; transmission linewidth; tunable optical filter; wavelength-division multiplexing systems; Fabry-Perot; Gallium arsenide; Glass; Micromachining; Optical filters; Optical sensors; Optical surface waves; Optical tuning; Surface waves; Wavelength division multiplexing;
Conference_Titel :
Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-55752-443-2
