Title :
Modeling with hierarchical Petri net of semiconductor manufacturing system
Author :
Dan, Huang ; Juanwei, Yan ; Fei, Qiao
Author_Institution :
CIMS Res. Center, Tongji Univ., Shanghai, China
Abstract :
A new kind of hierarchical Petri net (HPN) and its modeling approach for semiconductor manufacturing system are presented in this paper. Firstly, the applications of Petri nets in semiconductor manufacturing system are briefly reviewed. Then the definition of HPN and its modeling procedure are given. Finally, an application-oriented case study is illustrated.
Keywords :
Petri nets; flow shop scheduling; hierarchical systems; integrated circuit manufacture; semiconductor device manufacture; HPN; hierarchical Petri net; modeling; semiconductor manufacturing system; Job shop scheduling; Manufacturing processes; Manufacturing systems; Optimal scheduling; Petri nets; Postal services; Production; Semiconductor device manufacture; Time measurement; Virtual manufacturing;
Conference_Titel :
Control, Automation, Robotics and Vision Conference, 2004. ICARCV 2004 8th
Print_ISBN :
0-7803-8653-1
DOI :
10.1109/ICARCV.2004.1469775
