Title :
Molecular beam epitaxy regrowth of top reflectors for multiple wavelength vertical cavity laser arrays
Author :
Wipiejewski, T. ; Ko, Jiweon ; Thibeault, Brian J. ; Coldren, Larry A.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA
Abstract :
Summary form only given. We have fabricated novel multiple wavelength vertical cavity surface-emitting InGaAs QW DBR (VCSEL) arrays employing molecular beam epitaxy (MBE) regrowth of the top distributed Bragg reflector (DBR). The individual emission wavelength of each laser element in the 2D array is set by anodic oxidation and selective etching of the wafer before regrowth.
Keywords :
III-V semiconductors; etching; gallium arsenide; indium compounds; laser cavity resonators; laser mirrors; molecular beam epitaxial growth; optical fabrication; oxidation; quantum well lasers; reflectivity; semiconductor growth; semiconductor laser arrays; surface emitting lasers; 2D array; anodic oxidation; individual emission wavelength; laser element; molecular beam epitaxy regrowth; multiple wavelength InGaAs QW DBR VCSEL arrays; multiple wavelength vertical cavity laser arrays; selective etching; top distributed Bragg reflector; top reflectors; Amorphous materials; Distributed Bragg reflectors; Fingers; Gratings; Molecular beam epitaxial growth; Optical arrays; Optical polarization; Surface emitting lasers; Tellurium; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-55752-443-2
