DocumentCode
355075
Title
Laser micromachining with ultrafast pulses
Author
Liu, Xindong ; Du, Ding-Zhu ; Tien, A.-C. ; Mourou, Gerard
Author_Institution
Centre for Ultrafast Opt. Sci., Michigan Univ., Ann Arbor, MI, USA
fYear
1996
fDate
2-7 June 1996
Firstpage
376
Abstract
Summary form only given. As has been shown, the precision, with which the threshold of laser-induced breakdown (LIB) can be determined, increases dramatically as the pulse width of the laser decreases to picosecond and sub-picosecond regime. Also for ultrashort pulses the energy fluence needed to initiate breakdown is much less then the nanosecond pulse regime. In addition, picosecond and femtosecond laser pulses can deliver extremely localized heat to the target because the thermal diffusion from the focal region, which caused the surrounding area to heat up, is negligible within the pulse duration. This has opened doors to ultrafast laser applications in micromachining.
Keywords
high-speed optical techniques; laser beam machining; micromachining; laser micromachining; laser-induced breakdown; ultrafast pulses; Electric breakdown; Laser ablation; Laser theory; Micromachining; Microscopy; Optical pulses; Plastics; Positron emission tomography; Space vector pulse width modulation; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on
Conference_Location
Anaheim, CA, USA
Print_ISBN
1-55752-443-2
Type
conf
Filename
864812
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