• DocumentCode
    355075
  • Title

    Laser micromachining with ultrafast pulses

  • Author

    Liu, Xindong ; Du, Ding-Zhu ; Tien, A.-C. ; Mourou, Gerard

  • Author_Institution
    Centre for Ultrafast Opt. Sci., Michigan Univ., Ann Arbor, MI, USA
  • fYear
    1996
  • fDate
    2-7 June 1996
  • Firstpage
    376
  • Abstract
    Summary form only given. As has been shown, the precision, with which the threshold of laser-induced breakdown (LIB) can be determined, increases dramatically as the pulse width of the laser decreases to picosecond and sub-picosecond regime. Also for ultrashort pulses the energy fluence needed to initiate breakdown is much less then the nanosecond pulse regime. In addition, picosecond and femtosecond laser pulses can deliver extremely localized heat to the target because the thermal diffusion from the focal region, which caused the surrounding area to heat up, is negligible within the pulse duration. This has opened doors to ultrafast laser applications in micromachining.
  • Keywords
    high-speed optical techniques; laser beam machining; micromachining; laser micromachining; laser-induced breakdown; ultrafast pulses; Electric breakdown; Laser ablation; Laser theory; Micromachining; Microscopy; Optical pulses; Plastics; Positron emission tomography; Space vector pulse width modulation; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on
  • Conference_Location
    Anaheim, CA, USA
  • Print_ISBN
    1-55752-443-2
  • Type

    conf

  • Filename
    864812