Title :
Excimer laser machining by a multiple imaging system using holographic optical elements
Author :
Sasagawa, T. ; Yamamoto, Takayuki ; Inoue, M. ; Tanaka, Mitsuru ; Yagi, S.
Author_Institution :
Mitsubishi Electr. Corp., Hyogo, Japan
Abstract :
Summary form only given. We propose excimer laser machining using a multiple imaging system employing a holographic optical element (HOE). The multiple imaging system can generate many images from one mask pattern. The HOEs that we used were computer-generated phase holograms, the so-called kinoform type. Their diffraction efficiency can theoretically reach 100%.
Keywords :
computer-generated holography; excimer lasers; holographic optical elements; laser beam machining; computer-generated phase hologram; excimer laser machining; holographic optical element; kinoform; mask pattern; multiple imaging system; Diffraction; Holographic optical components; Holography; Lenses; Machining; Optical imaging; Optical pulses; Optimized production technology; Substrates; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-55752-443-2
