A high performance quartz package for millimeter-wave applications

The authors have designed, fabricated, and tested an advanced millimeter-wave package. The package consists of a gold-plated Kovar base, a 5-mil quartz substrate, a quartz ring, and a top cover. For the complete test structure, including two RF feedthroughs integrated with a 50-ohm line, the measured return loss is less than 1.2 dB up to 35 GHz. Assuming the package to be asymmetrical, the return loss and insertion loss for each RF feedthrough port can be estimated to be 21 dB and 0.4 dB, respectively.<>