Title :
16-term error model and calibration procedure for on wafer network analysis measurements (MMICs)
Author :
Butler, J.V. ; Rytting, D. ; Iskander, M.F. ; Pollard, R. ; Vanden Bossche, M.
Author_Institution :
Dept. of Electr. Eng., Utah Univ., Salt Lake City, UT, USA
Abstract :
A calibration procedure that includes all of the possible errors in an open air fixture such as an MMIC (monolithic microwave integrated circuit) device is discussed. In the case of a two-port network, this extends to 16 terms. The 16-term model will allow fixtures with poor grounding and numerous cross-talk paths to be accurately calibrated. The theory and methods used to solve the 16-term error model system, as well as results obtained from this model, are investigated. Corrected measurements using the new 16-term calibration procedure were compared with TRL calibration measurements and excellent agreement was observed.<>
Keywords :
MMIC; calibration; integrated circuit testing; measurement errors; microwave measurement; 16-term model; MMIC; calibration procedure; error model; monolithic microwave integrated circuit; on wafer network analysis measurements; onwafer technique; open air fixture; two-port network; Calibration; Cities and towns; Current measurement; Electric variables measurement; Equations; Fixtures; MMICs; Probes; Semiconductor device modeling; System testing;
Conference_Titel :
Microwave Symposium Digest, 1991., IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-87942-591-1
DOI :
10.1109/MWSYM.1991.147214
