High-T/sub c/ superconducting high-Q coplanar resonator made on MgO

Author

Konaka, Tsuneo ; Sato, Makoto ; Asano, Hidefumi ; Kubo, Shyugo ; Nagai, Yasuhiro

Author_Institution

NTT Transmission Syst. Lab., Ibaraki, Japan

fYear

1991

fDate

10-14 July 1991

Firstpage

1337

Abstract

Coplanar two-port transmission line resonators were made using high-T/sub c/ superconducting EuBa/sub 2/Cu/sub 3/O/sub x/ film on an MgO substrate. The EuBa/sub 2/Cu/sub 3/O/sub x/ films were prepared by magnetron sputtering and patterned by photolithography and Ar ion milling. The resonator characteristics were measured as a junction of temperature and power. The highest unloaded Q value obtained was 12500 at 28 K and at 3.9 GHz, and the surface resistance of the film was estimated at about 40 mu Omega . No change in Q values was observed at input power level less than -20 dBm.<>

Keywords

Q-factor; barium compounds; europium compounds; high-temperature superconductors; magnesium compounds; resonators; strip line components; superconducting devices; superconducting thin films; 28 K; 3.9 GHz; 40 muohm; Ar ion milling; EuBa/sub 2/Cu/sub 3/O/sub x/-MgO; MgO substrate; high-Q coplanar resonator; high-T/sub c/ superconducting films; lithographic patterning; magnetron sputtering; photolithography; surface resistance; two-port transmission line; Argon; Coplanar transmission lines; Lithography; Power transmission lines; Sputtering; Substrates; Superconducting films; Superconducting magnets; Superconducting transmission lines; Surface resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1991., IEEE MTT-S International

Conference_Location

Boston, MA, USA

ISSN

0149-645X

Print_ISBN

0-87942-591-1

Type

conf

DOI

10.1109/MWSYM.1991.147273

Filename

147273