DocumentCode
355187
Title
Surface-emitting microlensed LED and its self-focusing effect
Author
O-Seung Yang ; Song-Cheol Hong ; Young-Se Kwon
Author_Institution
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
fYear
1996
fDate
2-7 June 1996
Firstpage
460
Lastpage
461
Abstract
Summary form only given. GaAs-AlGaAs backside-emitting microlensed LEDs have been fabricated. Monolithic integration of AlGaAs microlens and conventional LED has been realized by meltback etching of hemisphere and subsequent regrowth of AlGaAs lens layer by liquid phase epitaxy (LPE).
Keywords
III-V semiconductors; aluminium compounds; etching; gallium arsenide; integrated optics; lenses; light emitting diodes; liquid phase epitaxial growth; optical fabrication; semiconductor growth; AlGaAs lens layer; GaAs-AlGaAs; GaAs-AlGaAs backside-emitting microlensed LEDs; LPE; hemisphere; liquid phase epitaxy; meltback etching; monolithic integration; self-focusing effect; subsequent regrowth; surface-emitting microlensed LED; Etching; Focusing; Gallium arsenide; Lenses; Light emitting diodes; Microoptics; Optical coupling; Optical interconnections; Scanning electron microscopy; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on
Conference_Location
Anaheim, CA, USA
Print_ISBN
1-55752-443-2
Type
conf
Filename
864924
Link To Document