DocumentCode
3552034
Title
Growth of 〈100〉 InP single crystals in quartz crucibles using the VGF technique
Author
Ejim, T.I.
Author_Institution
AT&T Bell Lab., Princeton, NJ, USA
fYear
1991
fDate
8-11 Apr 1991
Firstpage
196
Lastpage
199
Abstract
The growth of large diameter twin-free InP single crystals in the ⟨100⟩ orientation using the vertical gradient freeze (VGF) technique is discussed. The crystals were grown in quartz crucibles. An etch pit density (EPD) of <2×104/cm2 has been achieved in the ⟨100⟩ quartz-grown crystals. Both low S-doped, n-type (<5×1017/cm3) and high resistivity (<106 Ω-cm) Fe-doped crystals have been grown using this technique. Glow discharge mass spectrometry indicates that the use of a quartz crucible does not result in an unacceptable level of silicon incorporation into the crystal. This result is confirmed by the Hall effect measurement, which indicates that for the same weight percent Fe-doping, the resistivity of quartz-grown crystal is comparable to that of PBN-grown crystal
Keywords
III-V semiconductors; crystal growth from melt; indium compounds; semiconductor growth; 〈100〉 orientation; Hall effect; III-V semiconductor; InP single crystals; InP:Fe; InP:S; crystal growth; etch pit density; large diameter twin-free; mass spectrometry; quartz crucibles; resistivity; vertical gradient freeze technique; Conductivity; Crystalline materials; Crystals; Etching; Indium phosphide; Iron; Optical microscopy; Pressure control; Stress control; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1991., Third International Conference.
Conference_Location
Cardiff
Print_ISBN
0-87942-626-8
Type
conf
DOI
10.1109/ICIPRM.1991.147335
Filename
147335
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