• DocumentCode
    3552034
  • Title

    Growth of ⟨100⟩ InP single crystals in quartz crucibles using the VGF technique

  • Author

    Ejim, T.I.

  • Author_Institution
    AT&T Bell Lab., Princeton, NJ, USA
  • fYear
    1991
  • fDate
    8-11 Apr 1991
  • Firstpage
    196
  • Lastpage
    199
  • Abstract
    The growth of large diameter twin-free InP single crystals in the ⟨100⟩ orientation using the vertical gradient freeze (VGF) technique is discussed. The crystals were grown in quartz crucibles. An etch pit density (EPD) of <2×104/cm2 has been achieved in the ⟨100⟩ quartz-grown crystals. Both low S-doped, n-type (<5×1017/cm3) and high resistivity (<106 Ω-cm) Fe-doped crystals have been grown using this technique. Glow discharge mass spectrometry indicates that the use of a quartz crucible does not result in an unacceptable level of silicon incorporation into the crystal. This result is confirmed by the Hall effect measurement, which indicates that for the same weight percent Fe-doping, the resistivity of quartz-grown crystal is comparable to that of PBN-grown crystal
  • Keywords
    III-V semiconductors; crystal growth from melt; indium compounds; semiconductor growth; ⟨100⟩ orientation; Hall effect; III-V semiconductor; InP single crystals; InP:Fe; InP:S; crystal growth; etch pit density; large diameter twin-free; mass spectrometry; quartz crucibles; resistivity; vertical gradient freeze technique; Conductivity; Crystalline materials; Crystals; Etching; Indium phosphide; Iron; Optical microscopy; Pressure control; Stress control; Thermal stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide and Related Materials, 1991., Third International Conference.
  • Conference_Location
    Cardiff
  • Print_ISBN
    0-87942-626-8
  • Type

    conf

  • DOI
    10.1109/ICIPRM.1991.147335
  • Filename
    147335