Title :
The resonistor - A frequency selective device utilizing the mechanical resonance of a silicon substrate
Author :
Wilfinger, R.J. ; Bardell, P.H.
Author_Institution :
IBM Components Division, Hopewell Junction, N. Y.
Abstract :
This paper describes a tuned monolithic device which utilizes the mechanical resonance of the silicon substrate. The proposed device is compatible with monolithic technology and will operate from a few hundred cycles to tens of kilocycles.
Keywords :
Bridge circuits; Coupling circuits; Insertion loss; Piezoresistance; Resistors; Resonance; Resonant frequency; Silicon; Stress; Temperature;
Conference_Titel :
Electron Devices Meeting, 1966 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1966.187665
