DocumentCode :
3552502
Title :
A compatible MOS-bipolar device technology for low-power integrated circuits
Author :
Price, James E.
Volume :
12
fYear :
1966
fDate :
1966
Firstpage :
64
Lastpage :
66
Abstract :
A major problem in the design of low-power integrated circuits occurs in the need for high-value resistors occupying a small area. Another problem area exists in the need for active devices capable of operation at extremely low current levels. This paper consists largely of an attack upon these problems. The relative merits of various resistor structures, including the MOS resistor, are discussed, and their electrical characteristics are compared. Active device design for low-power circuit operation is also discussed, and the design of a bipolar transistor structure is described which optimizes the current gain at low current levels. Next, a process technology is described which allows MOS resistors, double-diffused planar epitaxial NPN transistors, and diffused junction isolations to be realized within the same integrated cricuit structure.
Keywords :
Conductivity; Design optimization; Epitaxial layers; Insulation; Integrated circuit technology; Life testing; MOSFETs; Resistors; Silicon; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1966 International
Type :
conf
DOI :
10.1109/IEDM.1966.187688
Filename :
1474527
Link To Document :
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