A process for ceramic dielectric isolation for integrated circuits

A process for dielectric isolation has been developed which is capable of providing integrated circuits with operational characteristics similar to those of discrete components. The technique makes use of a backside etch with a ceramic filled isolation medium. Life, thermal and shock tests have indicated no detrimental effects from the isolating cement. A total of 1035 logic block and gated latch devices have been supplied for Redman (NSA) and have given very successful results. The yield based on the present process is about 9% and cost studies have indicated that the Redman type device should cost about $2.66 to manufacture.