Monolithic KU-band diode phaseshifter

Recent efforts toward realization of integrated microwave diode phase-shifters have utilized hybrid technology, i.e., ceramic substrates and beam lead diodes. These techniques, however, do not as easily lend themselves to designs at frequencies as high as KU-Band. Small variations in diode placement can cause significant phase errors. Fabrication in monolithic form not only provides the accurate component placement limited only by photo-resist techniques, but also provides the cost advantage inherent in totally integrated-circuit processing.