• DocumentCode
    3553018
  • Title

    Efficient pulsed LSA operations of thick epitaxial GaAs

  • Author

    Eastman, L.F.

  • Volume
    15
  • fYear
    1969
  • fDate
    1969
  • Firstpage
    40
  • Lastpage
    40
  • Abstract
    For the first time high power and high efficiency LSA has been obtained with thick epitaxial GaAs. This GaAs was grown with a constant-temperature, solution-growth method where a temperature gradient between the substrate and a source material causes the material transport. Due to the steady-state condition a good doping profile can be obtained. Electron concentration from 4×1014to 2×1015have been accomplished and mobility is typically 7,500 cm2/V-s. The doping profiles have been investigated with a new Laser probe-method developed by E. F. Johnson at Cornell University and will be reported.
  • Keywords
    Circuits; Diodes; Doping profiles; Gallium arsenide; Iris; Predictive models; Semiconductor process modeling; Shape; Steady-state; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1969 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1969.188102
  • Filename
    1475983