DocumentCode
3553018
Title
Efficient pulsed LSA operations of thick epitaxial GaAs
Author
Eastman, L.F.
Volume
15
fYear
1969
fDate
1969
Firstpage
40
Lastpage
40
Abstract
For the first time high power and high efficiency LSA has been obtained with thick epitaxial GaAs. This GaAs was grown with a constant-temperature, solution-growth method where a temperature gradient between the substrate and a source material causes the material transport. Due to the steady-state condition a good doping profile can be obtained. Electron concentration from 4×1014to 2×1015have been accomplished and mobility is typically 7,500 cm2/V-s. The doping profiles have been investigated with a new Laser probe-method developed by E. F. Johnson at Cornell University and will be reported.
Keywords
Circuits; Diodes; Doping profiles; Gallium arsenide; Iris; Predictive models; Semiconductor process modeling; Shape; Steady-state; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1969 International
Type
conf
DOI
10.1109/IEDM.1969.188102
Filename
1475983
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