DocumentCode
3553193
Title
Reliability studies utilizing rapid-scan microscopy
Author
Gonzales, A.J. ; Varker, C.J.
Volume
16
fYear
1970
fDate
1970
Firstpage
50
Lastpage
50
Abstract
The conventional slow-scanning electron-microscope system has permitted limited monitoring of dynamic events. The information is recorded on sheet photographic film requiring 30-60 sec exposure time. A newly developed rapid-scan electron-microscope system that operates at conventional TV scan rates permits real-time observation of physical mechanisms and electrical effects.
Keywords
Microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1970 International
Type
conf
DOI
10.1109/IEDM.1970.188246
Filename
1476358
Link To Document