Title :
"Infrared detector arrays by R.F. multicathode sputtering"
Author :
Corsi, C. ; Alfieri, I. ; Petrocco, G.
Author_Institution :
Laboratorio di Elettronica dello Stato Solido del C.N.R., Rome, Italy
Keywords :
Germanium; Infrared detectors; Semiconductor films; Semiconductor materials; Semiconductor thin films; Sensor arrays; Silicon; Sputtering; Substrates; Vacuum technology;
Conference_Titel :
Electron Devices Meeting, 1972 International
DOI :
10.1109/IEDM.1972.249266
