DocumentCode
3553660
Title
"Infrared detector arrays by R.F. multicathode sputtering"
Author
Corsi, C. ; Alfieri, I. ; Petrocco, G.
Author_Institution
Laboratorio di Elettronica dello Stato Solido del C.N.R., Rome, Italy
Volume
18
fYear
1972
fDate
1972
Firstpage
13
Lastpage
14
Keywords
Germanium; Infrared detectors; Semiconductor films; Semiconductor materials; Semiconductor thin films; Sensor arrays; Silicon; Sputtering; Substrates; Vacuum technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1972 International
Type
conf
DOI
10.1109/IEDM.1972.249266
Filename
1477251
Link To Document