DocumentCode

3553699

Title

An overlapping electrode buried channel CCD

Author

Erb, D.M. ; Kotyczka, W. ; Su, S.C. ; Wang, C. ; Clough, G.

Author_Institution

Hughes Aircraft Company, Newport Beach, California

Volume

19

fYear

1973

fDate

1973

Firstpage

24

Lastpage

26

Keywords

Aluminum; Charge coupled devices; Circuits; Diodes; Electrodes; Etching; Insulation; Interface states; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1973 International

Type

conf

DOI

10.1109/IEDM.1973.188637

Filename

1477514