Title :
Electrical characteristics of long CCD shift registers fabricated using Al-Al2O3-Al double level metallization
Author :
Collins, D.R. ; Rhines, W.C. ; Barton, J.B. ; Shortes, S.R. ; Brodersen, R.W. ; Tasch, A.F., Jr.
Author_Institution :
Texas Instruments Incorporated, Dallas, Texas
Keywords :
Aluminum; Charge coupled devices; Charge transfer; Clocks; Electric variables; Electrodes; Fabrication; Instruments; Metallization; Shift registers;
Conference_Titel :
Electron Devices Meeting, 1973 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1973.188639
