Title :
An improved dielectric-junction combination isolation technique for integrated circuits
Author :
Sanders, T.J. ; Morcom, W.R. ; Kim, C.S.
Author_Institution :
Harris Semiconductor, Melbourne, Florida
Keywords :
Anisotropic magnetoresistance; Apertures; Bipolar transistors; Capacitance; Dielectrics; Electric breakdown; Etching; Integrated circuit interconnections; P-n junctions; Silicon compounds;
Conference_Titel :
Electron Devices Meeting, 1973 International
DOI :
10.1109/IEDM.1973.188642
