Title :
A high-gain, low-noise transistor fabricated with electron beam lithography
Author :
Pankratz, J.M. ; Yuan, H.T. ; Creagh, L.T.
Author_Institution :
Texas Instruments Incorporated, Dallas, Texas
Keywords :
Automatic generation control; Electron beams; Fabrication; Gain; Instruments; Lithography; Noise figure; Packaging; Resists; Solid state circuits;
Conference_Titel :
Electron Devices Meeting, 1973 International
DOI :
10.1109/IEDM.1973.188644
