DocumentCode

3553707

Title

A high-gain, low-noise transistor fabricated with electron beam lithography

Author

Pankratz, J.M. ; Yuan, H.T. ; Creagh, L.T.

Author_Institution

Texas Instruments Incorporated, Dallas, Texas

Volume

19

fYear

1973

fDate

1973

Firstpage

44

Lastpage

46

Keywords

Automatic generation control; Electron beams; Fabrication; Gain; Instruments; Lithography; Noise figure; Packaging; Resists; Solid state circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1973 International

Type

conf

DOI

10.1109/IEDM.1973.188644

Filename

1477521