Title :
DC Model for short-channel IGFET´s
Author :
Poon, H.C. ; Yau, L.D. ; Johnston, R.L. ; Beecham, D.
Author_Institution :
Bell Laboratories, Murray Hill, New Jersey
Keywords :
Capacitance; Channel bank filters; Dielectric constant; Dielectric substrates; Doping; Equations; Laboratories; Lithography; Silicon; Threshold voltage;
Conference_Titel :
Electron Devices Meeting, 1973 International
DOI :
10.1109/IEDM.1973.188673
