DocumentCode
3553820
Title
Development of a thinned, backside-illuminated charge-coupled device imager
Author
Shortes, S.R. ; Chan, W.W. ; Rhines, W.C. ; Barton, J.B. ; Collins, D.R.
Author_Institution
Texas Instruments Incorporated, Dallas, Texas
Volume
19
fYear
1973
fDate
1973
Firstpage
415
Lastpage
415
Keywords
Charge coupled devices; Charge measurement; Coatings; Current measurement; Dielectrics and electrical insulation; Fabrication; Image resolution; Instruments; Metallization; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1973 International
Type
conf
DOI
10.1109/IEDM.1973.188746
Filename
1477623
Link To Document