Title :
A charge transfer device with self-aligned electrodes
Author :
Takemoto, Iwao ; Ashikawa, Mikio ; Kubo, Masaharu ; Ohba, Shinya
Author_Institution :
Hitachi Ltd., Kokubunji, Tokyo, Japan
Keywords :
Aluminum; Analog memory; Charge coupled devices; Electrodes; Etching; Fabrication; Image sensors; Laboratories; Solid state circuits; Space technology;
Conference_Titel :
Electron Devices Meeting, 1973 International
DOI :
10.1109/IEDM.1973.188763
