DocumentCode

3553839

Title

A charge transfer device with self-aligned electrodes

Author

Takemoto, Iwao ; Ashikawa, Mikio ; Kubo, Masaharu ; Ohba, Shinya

Author_Institution

Hitachi Ltd., Kokubunji, Tokyo, Japan

Volume

19

fYear

1973

fDate

1973

Firstpage

473

Lastpage

476

Keywords

Aluminum; Analog memory; Charge coupled devices; Electrodes; Etching; Fabrication; Image sensors; Laboratories; Solid state circuits; Space technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1973 International

Type

conf

DOI

10.1109/IEDM.1973.188763

Filename

1477640