DocumentCode
3554168
Title
CO gas detection utilizing Pd-SnOx MIS heterostructure
Author
Kim, C.K. ; Kang, W.P.
Author_Institution
Dept. of Electr. Eng., Vanderbilt Univ., Nashville, TN, USA
fYear
1991
fDate
7-10 Apr 1991
Firstpage
819
Abstract
The triangular voltage sweep method was used to study the device characteristics of Pd-SnOx MIS heterostructure for detection of CO gas. An increase in area under the current peak in the J p-V plot and a shift of current peak toward more positive gate bias voltages were found with increasing CO gas concentration in an O2 or Ar environment. Results indicate that CO gas reacts with preadsorbed oxygen ions, which interact with positive ions in the SnO2 oxide layer, thus increasing the number of positive ions in the oxide of the MIS capacitor. It is concluded that preadsorbed oxygen ions in the SnO2 play a more important role than the lattice oxygen for CO gas detection in the Pd-SnOx MIS heterostructure
Keywords
carbon compounds; chemical variables measurement; electric sensing devices; gas sensors; metal-insulator-semiconductor structures; palladium; tin compounds; Ar environment; CO gas; Jp-V plot; MIS heterostructure; O2 environment; Pd-SnOx; positive gate bias voltages; triangular voltage sweep method; Argon; Capacitance-voltage characteristics; Capacitors; Electrodes; Gas detectors; Lattices; Polarization; Space charge; Temperature; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Southeastcon '91., IEEE Proceedings of
Conference_Location
Williamsburg, VA
Print_ISBN
0-7803-0033-5
Type
conf
DOI
10.1109/SECON.1991.147873
Filename
147873
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