DocumentCode :
3554168
Title :
CO gas detection utilizing Pd-SnOx MIS heterostructure
Author :
Kim, C.K. ; Kang, W.P.
Author_Institution :
Dept. of Electr. Eng., Vanderbilt Univ., Nashville, TN, USA
fYear :
1991
fDate :
7-10 Apr 1991
Firstpage :
819
Abstract :
The triangular voltage sweep method was used to study the device characteristics of Pd-SnOx MIS heterostructure for detection of CO gas. An increase in area under the current peak in the J p-V plot and a shift of current peak toward more positive gate bias voltages were found with increasing CO gas concentration in an O2 or Ar environment. Results indicate that CO gas reacts with preadsorbed oxygen ions, which interact with positive ions in the SnO2 oxide layer, thus increasing the number of positive ions in the oxide of the MIS capacitor. It is concluded that preadsorbed oxygen ions in the SnO2 play a more important role than the lattice oxygen for CO gas detection in the Pd-SnOx MIS heterostructure
Keywords :
carbon compounds; chemical variables measurement; electric sensing devices; gas sensors; metal-insulator-semiconductor structures; palladium; tin compounds; Ar environment; CO gas; Jp-V plot; MIS heterostructure; O2 environment; Pd-SnOx; positive gate bias voltages; triangular voltage sweep method; Argon; Capacitance-voltage characteristics; Capacitors; Electrodes; Gas detectors; Lattices; Polarization; Space charge; Temperature; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Southeastcon '91., IEEE Proceedings of
Conference_Location :
Williamsburg, VA
Print_ISBN :
0-7803-0033-5
Type :
conf
DOI :
10.1109/SECON.1991.147873
Filename :
147873
Link To Document :
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