• DocumentCode
    3554168
  • Title

    CO gas detection utilizing Pd-SnOx MIS heterostructure

  • Author

    Kim, C.K. ; Kang, W.P.

  • Author_Institution
    Dept. of Electr. Eng., Vanderbilt Univ., Nashville, TN, USA
  • fYear
    1991
  • fDate
    7-10 Apr 1991
  • Firstpage
    819
  • Abstract
    The triangular voltage sweep method was used to study the device characteristics of Pd-SnOx MIS heterostructure for detection of CO gas. An increase in area under the current peak in the J p-V plot and a shift of current peak toward more positive gate bias voltages were found with increasing CO gas concentration in an O2 or Ar environment. Results indicate that CO gas reacts with preadsorbed oxygen ions, which interact with positive ions in the SnO2 oxide layer, thus increasing the number of positive ions in the oxide of the MIS capacitor. It is concluded that preadsorbed oxygen ions in the SnO2 play a more important role than the lattice oxygen for CO gas detection in the Pd-SnOx MIS heterostructure
  • Keywords
    carbon compounds; chemical variables measurement; electric sensing devices; gas sensors; metal-insulator-semiconductor structures; palladium; tin compounds; Ar environment; CO gas; Jp-V plot; MIS heterostructure; O2 environment; Pd-SnOx; positive gate bias voltages; triangular voltage sweep method; Argon; Capacitance-voltage characteristics; Capacitors; Electrodes; Gas detectors; Lattices; Polarization; Space charge; Temperature; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Southeastcon '91., IEEE Proceedings of
  • Conference_Location
    Williamsburg, VA
  • Print_ISBN
    0-7803-0033-5
  • Type

    conf

  • DOI
    10.1109/SECON.1991.147873
  • Filename
    147873