DocumentCode

3554234

Title

Automatic registration in an electron-beam exposure system

Author

Davis, D.E. ; Moore, R.D. ; Williams, M.C. ; Woodard, O.C.

Author_Institution

IBM System Products Division, East Fishkill, Hopewell Junction, New York

Volume

22

fYear

1976

fDate

1976

Firstpage

440

Lastpage

442

Keywords

Bars; Calibration; Clocks; Diodes; Electron beams; Error correction; Integrated circuit manufacture; Pulp manufacturing; Signal processing; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1976 International

Type

conf

DOI

10.1109/IEDM.1976.189078

Filename

1478790