Title :
Automatic registration in an electron-beam exposure system
Author :
Davis, D.E. ; Moore, R.D. ; Williams, M.C. ; Woodard, O.C.
Author_Institution :
IBM System Products Division, East Fishkill, Hopewell Junction, New York
Keywords :
Bars; Calibration; Clocks; Diodes; Electron beams; Error correction; Integrated circuit manufacture; Pulp manufacturing; Signal processing; Throughput;
Conference_Titel :
Electron Devices Meeting, 1976 International
DOI :
10.1109/IEDM.1976.189078
