• DocumentCode
    3554268
  • Title

    Modelling of V-channel MOS transistor

  • Author

    Ahuja, B.K. ; Boothroyd, A.R.

  • Author_Institution
    Carleton University, Ottawa, Canada
  • Volume
    22
  • fYear
    1976
  • fDate
    1976
  • Firstpage
    573
  • Lastpage
    576
  • Abstract
    A physical model of the V-channel MOST is proposed which takes into account a non-uniform redistribution of oxide charge in the V-channel region during the fabrication process. Analysis of the surface potential and threshold voltage along the channel is carried out by a conformal mapping approach. For p-channel devices studied, good agreement has been obtained between the predictions of this model and measured d.c. and gm characteristics. Conclusions are drawn also on the influence of the oxide charge distribution on the characteristics of n-channel V-MOST´s.
  • Keywords
    Conformal mapping; Electrostatics; Etching; Fabrication; Furnaces; MOSFETs; Predictive models; Temperature distribution; Threshold voltage; Transconductance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1976 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1976.189109
  • Filename
    1478821