DocumentCode :
3554268
Title :
Modelling of V-channel MOS transistor
Author :
Ahuja, B.K. ; Boothroyd, A.R.
Author_Institution :
Carleton University, Ottawa, Canada
Volume :
22
fYear :
1976
fDate :
1976
Firstpage :
573
Lastpage :
576
Abstract :
A physical model of the V-channel MOST is proposed which takes into account a non-uniform redistribution of oxide charge in the V-channel region during the fabrication process. Analysis of the surface potential and threshold voltage along the channel is carried out by a conformal mapping approach. For p-channel devices studied, good agreement has been obtained between the predictions of this model and measured d.c. and gm characteristics. Conclusions are drawn also on the influence of the oxide charge distribution on the characteristics of n-channel V-MOST´s.
Keywords :
Conformal mapping; Electrostatics; Etching; Fabrication; Furnaces; MOSFETs; Predictive models; Temperature distribution; Threshold voltage; Transconductance;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1976 International
Type :
conf
DOI :
10.1109/IEDM.1976.189109
Filename :
1478821
Link To Document :
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