DocumentCode

3554643

Title

High performance "Upward" Bipolar technology for VLSI

Author

Agraz-Guerena, J. ; Pritchett, R.L. ; Panousis, P.T.

Author_Institution

Bell Telephone Laboratories, Allentown, Pennsylvania

Volume

24

fYear

1978

fDate

1978

Firstpage

209

Lastpage

212

Keywords

Boron; Circuits; Doping; Implants; Impurities; Laboratories; Oxidation; Substrates; Telephony; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1978 International

Type

conf

DOI

10.1109/IEDM.1978.189389

Filename

1479814