• DocumentCode
    3554698
  • Title

    A 640 kilopixel CCD imager for space applications

  • Author

    Blouke, M.M. ; Hall, J.E. ; Breitzmann, J.F.

  • Author_Institution
    Texas Instruments Incorporated, Dallas, Texas
  • Volume
    24
  • fYear
    1978
  • fDate
    1978
  • Firstpage
    412
  • Lastpage
    414
  • Abstract
    Functional 800 × 800 pixel charge coupled device (CCD) imagers have been successfully fabricated and operated. These devices are fabricated using a three level polysilicon gate technology. Pixel size is 15 µm × 15 µm with an active imaging area of 1.44 cm2. The overall dimensions of the chip are 17.8 mm × 17.8 mm. The devices are designed to operate cooled to -100°C, thinned with backside illumination. This paper will discuss the design, fabrication and preliminary operation of these imagers. These devices represent the largest CCDs and are believed to be the largest MOS circuits fabricated to date.
  • Keywords
    Charge coupled devices; Extraterrestrial measurements; Fabrication; Instruments; Optical design; Optical imaging; Optical noise; Pixel; Space charge; Space technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1978 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1978.189441
  • Filename
    1479866
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3554698