Title :
Effects of channel potential modulation in narrow channel CCD shift registers
Author :
Venkateswaran, K.
Author_Institution :
Fairchild Semiconductor, Palo Alto, California
Abstract :
Channel potential modulation due to narrow width effects is shown to create undesired voltage barriers at the corner turn of CCD Serial Parallel Serial Shift Registers. A scheme is shown to measure this barrier accurately and estimate the trapped charge. Experimentally measured trapped charge agrees with the estimated trapped charge within 65%. The accuracy is being limited by the accuracy to which the trapping area can be estimated.
Keywords :
Capacitance; Charge coupled devices; Charge measurement; Current measurement; Geometry; Implants; MOS devices; Shift registers; Threshold voltage; Very large scale integration;
Conference_Titel :
Electron Devices Meeting, 1978 International
DOI :
10.1109/IEDM.1978.189494