• DocumentCode
    3554986
  • Title

    A polysilicon base bipolar transistor

  • Author

    Solomon, P.M. ; Tang, D.D. ; Isaac, R.D.

  • Author_Institution
    IBM T. J. Watson Research Center, Yorktown Heights, NY
  • Volume
    25
  • fYear
    1979
  • fDate
    1979
  • Firstpage
    510
  • Lastpage
    513
  • Abstract
    We have made PNP bipolar transistors consisting of n and p type polysilicon layers on a 0.01 ohm-cm p type substrate. The object of making this device was to study minority carrier transport through the n polysilicon, although we have also succeeded in making transistors with current gains greater than 5. Preliminary results indicate strong recombination in the bulk base polysilicon, with diffusion lengths less than 40nm. The base region nearest or within, the single crystal substate is much more transparent to minority carriers. In addition, the polysilicon seems to block minority carrier injection from the substrate.
  • Keywords
    Annealing; Atomic layer deposition; Atomic measurements; Bipolar transistors; Electrical resistance measurement; Etching; FETs; Impurities; Integrated circuit interconnections; MOS integrated circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1979 Internationa
  • Type

    conf

  • DOI
    10.1109/IEDM.1979.189670
  • Filename
    1480535