DocumentCode
3554986
Title
A polysilicon base bipolar transistor
Author
Solomon, P.M. ; Tang, D.D. ; Isaac, R.D.
Author_Institution
IBM T. J. Watson Research Center, Yorktown Heights, NY
Volume
25
fYear
1979
fDate
1979
Firstpage
510
Lastpage
513
Abstract
We have made PNP bipolar transistors consisting of n and p type polysilicon layers on a 0.01 ohm-cm p type substrate. The object of making this device was to study minority carrier transport through the n polysilicon, although we have also succeeded in making transistors with current gains greater than 5. Preliminary results indicate strong recombination in the bulk base polysilicon, with diffusion lengths less than 40nm. The base region nearest or within, the single crystal substate is much more transparent to minority carriers. In addition, the polysilicon seems to block minority carrier injection from the substrate.
Keywords
Annealing; Atomic layer deposition; Atomic measurements; Bipolar transistors; Electrical resistance measurement; Etching; FETs; Impurities; Integrated circuit interconnections; MOS integrated circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1979 Internationa
Type
conf
DOI
10.1109/IEDM.1979.189670
Filename
1480535
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