• DocumentCode
    3554993
  • Title

    AC plasma display device technology overview

  • Author

    Pleshko, Peter

  • Author_Institution
    International Business Machines Corporation, Kingston, New York
  • Volume
    25
  • fYear
    1979
  • fDate
    1979
  • Firstpage
    532
  • Lastpage
    535
  • Abstract
    AC Plasma display panel technology has reached maturity as evidenced by its manufacture for over five years and by several companies. The technology choices that one has in the fabrication of matrix-addressed panels operated with memory, are numerous. The effect on yield and reliability of some of the materials and processing options are discussed.
  • Keywords
    Conductive films; Conductors; Dielectric thin films; Etching; Fabrication; Glass; Plasma displays; Resists; Substrates; Thick films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1979 Internationa
  • Type

    conf

  • DOI
    10.1109/IEDM.1979.189676
  • Filename
    1480541