Title :
AC plasma display device technology overview
Author_Institution :
International Business Machines Corporation, Kingston, New York
Abstract :
AC Plasma display panel technology has reached maturity as evidenced by its manufacture for over five years and by several companies. The technology choices that one has in the fabrication of matrix-addressed panels operated with memory, are numerous. The effect on yield and reliability of some of the materials and processing options are discussed.
Keywords :
Conductive films; Conductors; Dielectric thin films; Etching; Fabrication; Glass; Plasma displays; Resists; Substrates; Thick films;
Conference_Titel :
Electron Devices Meeting, 1979 Internationa
DOI :
10.1109/IEDM.1979.189676
