DocumentCode
3555011
Title
Compatible VVMOS and NMOS technology for power MOS IC´s
Author
Lane, W.A. ; Salama, C.A.T.
Author_Institution
University of Toronto, Toronto, Ontario, Canada
Volume
25
fYear
1979
fDate
1979
Firstpage
598
Lastpage
600
Abstract
This paper presents a process which allows simultaneous fabrication of VVMOS power devices and planar NMOS devices resulting in MOS power integrated circuits for such applications as switching voltage regulators and display drivers. The characteristics and limitations of the process are discussed and experimental results obtained on devices and simple circuits using aluminum gate NMOST driving circuitry and power VVMOST outputs are presented.
Keywords
Aluminum; Displays; Driver circuits; Fabrication; Integrated circuit technology; MOS devices; Power integrated circuits; Regulators; Switching circuits; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1979 Internationa
Type
conf
DOI
10.1109/IEDM.1979.189694
Filename
1480559
Link To Document