• DocumentCode
    3555011
  • Title

    Compatible VVMOS and NMOS technology for power MOS IC´s

  • Author

    Lane, W.A. ; Salama, C.A.T.

  • Author_Institution
    University of Toronto, Toronto, Ontario, Canada
  • Volume
    25
  • fYear
    1979
  • fDate
    1979
  • Firstpage
    598
  • Lastpage
    600
  • Abstract
    This paper presents a process which allows simultaneous fabrication of VVMOS power devices and planar NMOS devices resulting in MOS power integrated circuits for such applications as switching voltage regulators and display drivers. The characteristics and limitations of the process are discussed and experimental results obtained on devices and simple circuits using aluminum gate NMOST driving circuitry and power VVMOST outputs are presented.
  • Keywords
    Aluminum; Displays; Driver circuits; Fabrication; Integrated circuit technology; MOS devices; Power integrated circuits; Regulators; Switching circuits; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1979 Internationa
  • Type

    conf

  • DOI
    10.1109/IEDM.1979.189694
  • Filename
    1480559