Title :
GaAlAs/GaAs heterojunction Schottky barrier gate CCD
Author :
Liu, Y.Z. ; Deyhimy, I. ; Anderson, R.J. ; Harris, J.S. ; Tomasetta, L.R.
Author_Institution :
Rockwell International Electronics Research Center, Thousand Oaks, California
Abstract :
A buried channel Schottky barrier gate GaAlAs/GaAs CCD is described. Device structures, fabrication techniques and results are discussed. Charge transfer efficiency of 0.9993 per transfer has been measured on these 30 gate (10 pixel) CCDs. Dark current was found to be about an order of magnitude lower in GaAlAs than in GaAs. The best Ga.78Al.22As device has between 2 to 4nA/cm2at room temperature.
Keywords :
Charge coupled devices; Charge measurement; Charge transfer; Current measurement; Dark current; Fabrication; Gallium arsenide; Heterojunctions; Schottky barriers; Temperature;
Conference_Titel :
Electron Devices Meeting, 1979 Internationa
DOI :
10.1109/IEDM.1979.189701