Title :
VLSI: Challenges and choices
Author_Institution :
Texas Instruments, Incorporated, Dallas, Texas
Keywords :
CMOS technology; Instruments; Integrated circuit technology; Integrated optics; MOS devices; Materials science and technology; Optical device fabrication; Photonic integrated circuits; Process design; Very large scale integration;
Conference_Titel :
Electron Devices Meeting, 1979 Internationa
DOI :
10.1109/IEDM.1979.189715
