DocumentCode
3555142
Title
A process design course utilizing micromechanical devices
Author
Lu, Manfang ; Schmidt, Martin A.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
fYear
1991
fDate
12-14 Jun 1991
Firstpage
60
Lastpage
63
Abstract
Describes a course which is being developed at MIT aimed at incorporation of experimental microfabrication process design at the undergraduate level. They discuss the philosophy and organization of this course and explain how it has been implemented using micromechanical structures as the test vehicle. In particular, a silicon pressure sensor was successfully fabricated by a team of four students in one semester, and was tested and demonstrated to measure pressures in the range of 0-5 psi
Keywords
educational courses; electric sensing devices; micromechanical devices; pressure transducers; 0 to 5 psi; MIT; Si; microfabrication process design; micromechanical devices; pressure sensor; undergraduate level; Computer science; Design engineering; Education; Fabrication; Laboratories; Micromechanical devices; Process design; Silicon; Testing; Vehicles;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 1991. Proceedings., Ninth Biennial
Conference_Location
Melbourne, FL
ISSN
0749-6877
Print_ISBN
0-7803-0109-9
Type
conf
DOI
10.1109/UGIM.1991.148122
Filename
148122
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