Title :
A process design course utilizing micromechanical devices
Author :
Lu, Manfang ; Schmidt, Martin A.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Abstract :
Describes a course which is being developed at MIT aimed at incorporation of experimental microfabrication process design at the undergraduate level. They discuss the philosophy and organization of this course and explain how it has been implemented using micromechanical structures as the test vehicle. In particular, a silicon pressure sensor was successfully fabricated by a team of four students in one semester, and was tested and demonstrated to measure pressures in the range of 0-5 psi
Keywords :
educational courses; electric sensing devices; micromechanical devices; pressure transducers; 0 to 5 psi; MIT; Si; microfabrication process design; micromechanical devices; pressure sensor; undergraduate level; Computer science; Design engineering; Education; Fabrication; Laboratories; Micromechanical devices; Process design; Silicon; Testing; Vehicles;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1991. Proceedings., Ninth Biennial
Conference_Location :
Melbourne, FL
Print_ISBN :
0-7803-0109-9
DOI :
10.1109/UGIM.1991.148122
