Title :
Experimental evaluation of PPM focussed electron beams
Author :
Dohler, G. ; Bowen, W. ; Scafuri, F. ; Groshart, G.
Author_Institution :
University Drive, Arlington, Heights, Illinois
Keywords :
Application software; Assembly; Electron beams; Laboratories; Manufacturing; Probes; Testing;
Conference_Titel :
Electron Devices Meeting, 1980 International
DOI :
10.1109/IEDM.1980.189873
