DocumentCode

3555249

Title

Experimental evaluation of PPM focussed electron beams

Author

Dohler, G. ; Bowen, W. ; Scafuri, F. ; Groshart, G.

Author_Institution

University Drive, Arlington, Heights, Illinois

Volume

26

fYear

1980

fDate

1980

Firstpage

487

Lastpage

487

Keywords

Application software; Assembly; Electron beams; Laboratories; Manufacturing; Probes; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1980 International

Type

conf

DOI

10.1109/IEDM.1980.189873

Filename

1481316