A review of a statistical tool set for the yield enhancement of integrated circuits

Author

Joyce, Robert J. ; Alderman, Ron D. ; Djeu, Tuck P. ; Smith, John C.

Author_Institution

Harris Corp., Melbourne, FL, USA

fYear

1991

fDate

12-14 Jun 1991

Firstpage

128

Lastpage

133

Abstract

The authors describe a system that Harris Semiconductor has developed to aid in the analysis of circuit failures and predictions of functional yeilds. This system is based on a relational database in conjunction with the application of statistical tools. The core of the system is the relational database that uses the commercially available INGRES software. The system design is reviewed along with the supporting software and hardware tools used to create a tool box for yield analysis. Given the current levels of sophistication involved in manufacturing semiconductors, the flexibility of a relational database coupled with the correct analytical and statistical tools provides a powerful system for a yield enhancement resource

Keywords

circuit reliability; electronic engineering computing; failure analysis; integrated circuit manufacture; integrated circuit technology; relational databases; statistical analysis; Harris Semiconductor; INGRES software; circuit failures; integrated circuits; manufacturing; relational database; statistical tool set; yield analysis; yield enhancement; CADCAM; Circuit analysis; Computer aided manufacturing; Cost function; Databases; Electronics industry; Failure analysis; Integrated circuit yield; Probes; Productivity;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 1991. Proceedings., Ninth Biennial

Conference_Location

Melbourne, FL

ISSN

0749-6877

Print_ISBN

0-7803-0109-9

Type

conf

DOI

10.1109/UGIM.1991.148136

Filename

148136