• DocumentCode
    3555310
  • Title

    An MOS chip for surface impedance measurement and moisture monitoring

  • Author

    Garverick, Steven L. ; Senturia, Stephen D.

  • Author_Institution
    Massachusetts Institute of Technology, Cambridge, Massachusetts
  • Volume
    26
  • fYear
    1980
  • fDate
    1980
  • Firstpage
    685
  • Lastpage
    688
  • Abstract
    Surface impedance measurements are employed in a variety of applications such as moisture sensing (1), (2). Sheet resistances as high as 1016Ohms/sq are often encountered (3), and reliable measurements are difficult to obtain. This paper reports a planar MOS device and associated measurement technique that can be used to make AC sheet resistance measurements in the frequency range 1 Hz - 10 kHz, and which yields reproducible measurements for sheet resistances as high as 1016Ohms/sq.
  • Keywords
    Capacitance; Electrical resistance measurement; Electrodes; FETs; Impedance measurement; Moisture; Monitoring; Thin film devices; Transfer functions; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1980 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1980.189928
  • Filename
    1481371
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3555310