DocumentCode :
3555353
Title :
Process and device simulation at Harris Semiconductor
Author :
Lowther, Rex
Author_Institution :
Harris Semiconductor, Melbourne, FL, USA
fYear :
1991
fDate :
12-14 Jun 1991
Firstpage :
153
Lastpage :
158
Abstract :
The state of the art in the field of process and device simulation at Harris Semiconductor, universities, and vendors is reviewed. Particular emphasis is on interrelationships between these groups and between the supporters of the simulation tools at Harris and Harris process/device designers. Simulation of one of the advanced processes is discussed in detail to show how important simulation has become to process development and to illustrate many of the points discussed. Availability of the source code to the companies has allowed Harris programmers to make several incremental improvements at user´s request in the time needed. Some of these enhancements are also discussed
Keywords :
digital simulation; electronic engineering computing; semiconductor device models; Harris Semiconductor; SOI simulation; device simulation; simulation tools; source code; Computational modeling; Computer industry; Computer interfaces; Discrete event simulation; Grid computing; Ice; Industrial relations; Physics computing; Process design; Technological innovation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1991. Proceedings., Ninth Biennial
Conference_Location :
Melbourne, FL
ISSN :
0749-6877
Print_ISBN :
0-7803-0109-9
Type :
conf
DOI :
10.1109/UGIM.1991.148141
Filename :
148141
Link To Document :
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