DocumentCode
3555356
Title
A new conduction model for polycrystalline silicon films
Author
Lu, N.C.C. ; Gerzberg, L. ; Lu, C.Y. ; Meindl, J.D.
Author_Institution
Stanford University, Stanford, California
Volume
26
fYear
1980
fDate
1980
Firstpage
833
Lastpage
834
Keywords
Conductive films; Doping; Electrical resistance measurement; Scattering; Semiconductor films; Semiconductor process modeling; Silicon; Tellurium; Temperature distribution; Thermionic emission;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1980 International
Type
conf
DOI
10.1109/IEDM.1980.189969
Filename
1481412
Link To Document