Title :
An N-well C-MOS dynamic RAM
Author :
Shimohigashi, Katsuhiro ; Masuda, Hiroo ; Kamigaki, Yoshiaka ; Itoh, Kiyoo ; Hashimoto, Norikazu ; Kondo, Mamoru
Author_Institution :
Hitachi Ltd., Tokyo, Japan
Abstract :
A new type of dynamic RAMs, an N-well CMOS dynamic RAM, is proposed as a promising candidate for future VLSI RAMs and experimental results of a 4-kbit RAM, fabricated with an advanced 2 µm lithography are presented. For the design of greater than 256-kbit dynamic RAMs, two major problems should be solved: an increase of a substrate current and an α-particle induced soft error problem. The N-well CMOS RAM technology will be one solution to overcome these problems. The use of PMOS transistors as load elements in peripheral circuits of the N-well CMOS RAM reduces the substrate current by at least two orders of magnitude and the potential barrier between the N-type well and the P-type substrate rejects holes generated in the substrate, resulting in the reduction of soft error rates.
Keywords :
CMOS technology; Circuits; DRAM chips; Laboratories; Lithography; MOS devices; MOSFETs; Random access memory; Read-write memory; Voltage;
Conference_Titel :
Electron Devices Meeting, 1980 International
DOI :
10.1109/IEDM.1980.189970