مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

3555368

Title :

A planar-processed PI-FET accelerometer

Author :

Chen, P. ; Jolly, R. ; Halac, G. ; Muller, R.S. ; White, R.M. ; Andrews, A.P. ; Motamedi, M.E.

Author_Institution :

University of California, Berkeley

Volume :

fYear :

1980

fDate :

1980

Firstpage :

848

Lastpage :

849

Keywords :

Accelerometers; Anisotropic magnetoresistance; Capacitive sensors; Etching; Laboratories; MOSFETs; Signal design; Silicon; Voltage; Zinc oxide;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Electron Devices Meeting, 1980 International

Type :

conf

DOI :

10.1109/IEDM.1980.189980

Filename :

1481423

Link To Document :